ULTRA-LONG GLASS TIPS FOR ATOMIC-FORCE MICROSCOPY

Citation
A. Ruf et al., ULTRA-LONG GLASS TIPS FOR ATOMIC-FORCE MICROSCOPY, Journal of micromechanics and microengineering, 6(2), 1996, pp. 254-260
Citations number
21
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
ISSN journal
09601317
Volume
6
Issue
2
Year of publication
1996
Pages
254 - 260
Database
ISI
SICI code
0960-1317(1996)6:2<254:UGTFAM>2.0.ZU;2-2
Abstract
A new variety of ultra-long tips for atomic force microscopy has been fabricated using photoetchable glass. Photoetchable glass is structure d by UV exposure through a quartz mask followed by a heat treatment an d etch process in hydrofluoric acid. The process is based on different etching rates with a ratio of about 1:20 between unexposed and expose d parts of the glass. Tips longer than 100 mu m with a tip radius down to 20 nm are possible. The cantilevers are made from silicon carbide. The mechanical properties of such long tips are compared, in theory a nd in practice, with conventional cantilevers from silicon and silicon nitride. Their strong sensitivity to friction forces for contrast for mation in atomic force microscopy is discussed.