FABRICATION OF INP-BASED FREESTANDING MICROSTRUCTURES BY SELECTIVE SURFACE MICROMACHINING

InP-based microstructuring methods are presented with a view to develo p micro opto electro mechanical systems (MOEMS). Fabrication parameter s and dimensions of the freestanding structures are determined for spe cific technological constraints (etching selectivities, anisotropy, st icking phenomena). 1 mu m thick InGaAs deformable cantilevers, bridges and membranes have been fabricated by elimination of around 2 mu m-th ick InAlAs sacrificial layers. Showing high aspect ratio, smooth surfa ces and high accuracy in thicknesses, these microstructures are perfec tly suitable for optical applications.