MONTE-CARLO SIMULATION OF THE FORMATION OF MCS(-IONS() MOLECULAR)

During recent years, the use of the MCs(+) ion technique for the quant ification of major elements or at interface regions has gained a lot o f interest. It has been shown that this technique is very successful i n the field of III-V semiconductor applications. Unfortunately, for ma ny other applications the technique is hampered by some not well under stood problems. In this paper we will try to gain a deeper insight int o the formation mechanism of the molecular MCs(+) ions. A Monte Carlo model to simulate the cluster formation and to calculate the energy sp ectra of the MCs(+) ions will be presented. The model is evaluated by comparing the calculated energy spectra with experimental data. It wil l be shown that a very good agreement is obtained.