PERFORMANCE OF A POU PURIFIER IN IONIC CONTAMINATION REMOVAL

Authors
PAREKH B ZAHKA J GUPTA K TRIPLETT B TRAN M
Citation
B. Parekh et al., PERFORMANCE OF A POU PURIFIER IN IONIC CONTAMINATION REMOVAL, Solid state technology, 39(8), 1996, pp. 77
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
39
Issue
8
Year of publication
1996
Database
ISI
SICI code
0038-111X(1996)39:8<77:POAPPI>2.0.ZU;2-Z
Abstract
A new point-of-use (POU) chemical purifier has been introduced to main tain the ionic ultrapurity of dilute hydrofluoric acid (DHF) chemical baths [1]. This technology allows continuous, on-line removal of metal lic ions from recirculation baths. It offers a significant improvement over other methods of maintaining ionic purity, including intermitten t off-line purification and periodic bath replacement with new batches of ultrapure chemicals.