The as-deposited and annealed Ge-Au film and Ge-Au/Au bilayer films ha
ve been observed by transmission electron microscopy. The bilayer with
a, composition of Ge-5at%Au film is amorphous, while the Ge-22at%Au f
ilm is polycrystalline. Higher concentration of Au raises the structur
al heterogeneity and instability. Fractals can be observed in the Ge-5
at%Au/Au bilayer samples annealed at 60-100 degrees C. The difference
of the fractal patterns generated from Ge-Au/Au and a-Ge/Au films can
be attributed to the higher heterogeneity and instability in Ge-Au/Au
bilayers.