The preparation of a metallic diffuse fringe film system by dc-magnetr
on sputtering is described. The diffuse fringe structure of the film s
ystem is clearly observed in the SEM photograph when, during the film
deposition process, the distance between the slit shutter and the subs
trate is large enough. Our experimental results show that the anomalou
s nonlinear I-V behavior of the system is mainly caused by the diffuse
fringe effect. The temperature dependence of the sheet resistance is
similar to that of the metallic flat film system in the temperature in
terval 77-300 K.