MORPHOLOGY AND STRUCTURAL CHARACTERIZATION OF PLASMA-ASSISTED PREPARED CARBON-FILMS

Since the properties of amorphous carbon films are determined by the s tructure of the amorphous network and embedded particles, it is necess ary to characterize these properties with respect to the deposition co nditions. Relating the particle structure to that of the cathode mater ial may provide information on the origin and growth. The morphology a nd structure of amorphous carbon films deposited with a pulsed are sou rce (Laser-Arc) were studied using microscopic (optical, transmission electron microscopy (TEM) and atomic force microscopy (AFM)) and spect roscopic (Raman and electron energy loss spectroscopy (EELS)) investig ation methods. The influence of the deposition temperature and anneali ng after deposition on the structure of the amorphous films was studie d. The results of structural analysis show that the homogeneous, very smooth film obtained is amorphous and diamond-like, with a plasmon pea k situated at about 28 eV. The influence of the deposition temperature can be seen in the shift of the plasmon peak in the electron energy l oss spectrum and the square relation of the fitted DIG peak in the Ram an spectrum. Particles with dimensions of several hundred nanometres a re embedded in the film. In contrast with the film structure, these pa rticles show graphite-like behaviour in the Raman spectrum correspondi ng to the polycrystalline graphite target material.