Direct fluorinations of (i) hydrogenated diamond surfaces and (ii) oxi
dized diamond surfaces have been performed by thermal reaction in elem
ental fluorine. Chemisorption of fluorine on diamond powder surfaces h
as been investigated by diffuse-reflectance infrared Fourier transform
spectroscopy. The hydrogenated diamond surface is fluorinated by ther
mal reaction in fluorine molecules. Hydrogen chemisorbed on the diamon
d surface is abstracted by the reaction with fluorine molecules even a
t -10 degrees C. Peaks due to C-F stretching vibrations are observed a
t 1096, 1251 and 1347 cm(-1) after the fluorination of the hydrogenate
d diamond at 100 degrees C. These C-F stretching peaks increase in int
ensity with increase in fluorination temperature. C=O species on the o
xidized diamond surface are affected by fluorine molecules above 100 d
egrees C. Peaks due to C=O stretching vibrations on the oxidized diamo
nd surface remained and shifted into the higher wavenumber region afte
r reaction with fluorine at low temperatures below 400 degrees C. The
fluorination of the oxidized diamond at 500 degrees C gives similar ch
emisorbed states of fluorine to those of the hydrogenated diamond. The
diamond surface is fully covered with fluorine by the fluorination at
500 degrees C.