MICROLENSES FABRICATED BY ULTRAVIOLET EXCIMER-LASER IRRADIATION OF POLY(METHYL METHACRYLATE) FOLLOWED BY STYRENE DIFFUSION

Authors
LAZARE S LOPEZ J TURLET JM KUFNER M KUFNER S CHAVEL P
Citation
S. Lazare et al., MICROLENSES FABRICATED BY ULTRAVIOLET EXCIMER-LASER IRRADIATION OF POLY(METHYL METHACRYLATE) FOLLOWED BY STYRENE DIFFUSION, Applied optics, 35(22), 1996, pp. 4471-4475
Citations number
9
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
35
Issue
22
Year of publication
1996
Pages
4471 - 4475
Database
ISI
SICI code
0003-6935(1996)35:22<4471:MFBUEI>2.0.ZU;2-W
Abstract
A new technique of microlens array fabrication based on the use of exc imer laser radiation is described. Poly(methyl methacrylate) (PMMA) su bstrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry o f this process and the optical quality of the lenses are discussed. (C ) 1996 Optical Society of America