NOVEL FINGERPRINT SCANNING ARRAYS USING POLYSILICON TFTS ON GLASS ANDPOLYMER SUBSTRATES

Citation
Nd. Young et al., NOVEL FINGERPRINT SCANNING ARRAYS USING POLYSILICON TFTS ON GLASS ANDPOLYMER SUBSTRATES, IEEE electron device letters, 18(1), 1997, pp. 19-20
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic
ISSN journal
07413106
Volume
18
Issue
1
Year of publication
1997
Pages
19 - 20
Database
ISI
SICI code
0741-3106(1997)18:1<19:NFSAUP>2.0.ZU;2-Z
Abstract
Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and t wo poly-Si thin film transistors for addressing and read out. The devi ces were fabricated on glass, polyimide and polyethersulphone substrat es using a low temperature (<250 degrees C) process.