Nd. Young et al., NOVEL FINGERPRINT SCANNING ARRAYS USING POLYSILICON TFTS ON GLASS ANDPOLYMER SUBSTRATES, IEEE electron device letters, 18(1), 1997, pp. 19-20
Novel fingerprint scanning arrays based upon capacitance sensing have
been made. Each sensor element consists of a capacitor electrode and t
wo poly-Si thin film transistors for addressing and read out. The devi
ces were fabricated on glass, polyimide and polyethersulphone substrat
es using a low temperature (<250 degrees C) process.