SOFT-X-RAY SPECTROMICROSCOPY

In recent years much progress has been made in the field of spectromic roscopy, the combination of spectroscopy with lateral resolution. This method is applicated increasingly to problems in biology, material an d surface science. Different technical approaches will be outlined and discussed with respect to their imaging and spectroscopic properties. The scanning soft x-ray microscope at HASYLAB has been equipped conti nuously with new operating modes and has now the capability to use pho toelectrons, photodesorbed ions, luminescence, fluorescence, scattered and transmitted photons for imaging and spectroscopy. Examinations of artificial structures, of luminescent ceramics and crystals and of po rous silicon will be presented.