STUDY OF THE X-RAY MICROBEAM FOR SCANNING MICROSCOPES

Authors
IKETAKI Y HORIKAWA Y MOCHIMARU S NAGAI K KIYOKURA T OSHIMA M YAGISHITA A
Citation
Y. Iketaki et al., STUDY OF THE X-RAY MICROBEAM FOR SCANNING MICROSCOPES, Journal of electron spectroscopy and related phenomena, 80, 1996, pp. 353-356
Citations number
15
Categorie Soggetti
Spectroscopy
Journal title
Journal of electron spectroscopy and related phenomena → ACNP
ISSN journal
03682048
Volume
80
Year of publication
1996
Pages
353 - 356
Database
ISI
SICI code
0368-2048(1996)80:<353:SOTXMF>2.0.ZU;2-7
Abstract
We fabricated a Schwarzschild X-ray objective which has the maximum X- ray transmittance of 9% at the wavelength of 14.1nm and evaluated an X -ray microbeam formed by the objective. We measured the knife-edge res ponse of the microbeam and performed a fitting calculation of the resp onse, using the point-spread function for the objective. It was found that the beam diameter of the microbeam was 45nm. In this paper, detai ls of these experiments and the application of the microbeam will be d iscussed.