DEVELOPMENT OF A GRAZING-INCIDENCE SOFT-X-RAY MICROSCOPE WITH A LASER-PRODUCED PLASMA SOURCE

A soft X-ray microscope was constructed using grazing incidence mirror s and a laser-produced plasma source. A Q-switched Nd-YAG laser (1.064 mu m, 530mJ, 6ns pulse) and a Wolter type-I mirror objective were use d. The spatial resolution estimated by the edge profile (25% - 75%) wa s about 60nm using 5 - 7nm soft Xrays from an Al target. Hydrated biol ogical specimens, such as human blood cells, could be observed using a n environmental chamber with Si3N4 windows (thickness: 0.1 mu m), a ba ck-illuminated CCD camera, and 3-5nm soft X-rays from a Ta target.