SOFT-X-RAY SCANNING PHOTOELECTRON MICROSCOPE USING WOLTER-TYPE FOCUSING MIRROR

The soft x-ray scanning photoelectron microscope has been developed an d installed at a soft x-ray beamline of the Photon Factory (KEK-PF). T he microscope uses a Welter type-I grazing incidence mirror to form a soft xray microbeam. The mirror was fabricated more accurately than pr evious one by using a new replication method, allowing a 0.47-mu m mic robeam to be ahcieved. In addition, a high-precision x-y sample stage made it possible to obtain two dimensional photoelectron images. The m icroscope demonstrated a total-photoyield image of 0.3-mu m-linewidth stripe patterns and an energy-selected photoelectron image of 2-mu m-l inewidth stripe patterns.