THE EUV PERFORMANCE OF AN ION-ETCHED BLAZED DIFFRACTION GRATING

A spherical holographic ion-etched diffraction grating with low-blaze angle has been purchased for the purpose of vendor evaluation. We pres ent the results of surface measurements made on the bare grating subst rate using an atomic force microscope. The efficiency of the grating a t grazing incidence and at EW wavelengths was measured using a synchro tron light source. After coating the grating with a multilayer, the no rmal incidence efficiency was measured. The results of these measureme nts are compared to those obtained from samples from other vendors.