DEVELOPMENT AND PERFORMANCE OF A PROFILOMETER FOR MEASUREMENT OF MIRROR SURFACE FIGURE

Authors
SUGAWARA H YANAGIHARA M ASAOKA S OKUSAWA M MAEZAWA H
Citation
H. Sugawara et al., DEVELOPMENT AND PERFORMANCE OF A PROFILOMETER FOR MEASUREMENT OF MIRROR SURFACE FIGURE, Journal of electron spectroscopy and related phenomena, 80, 1996, pp. 485-488
Citations number
NO
Categorie Soggetti
Spectroscopy
Journal title
Journal of electron spectroscopy and related phenomena → ACNP
ISSN journal
03682048
Volume
80
Year of publication
1996
Pages
485 - 488
Database
ISI
SICI code
0368-2048(1996)80:<485:DAPOAP>2.0.ZU;2-S
Abstract
A profilometer has been developed to measure quantitatively the surfac e figures of optical elements. It consists of a He-Ne laser source and a position-sensitive detector mounted on stepper-motor-driven platfor ms. Its application has been made successfully to the estimate of chan ges in the surface slope and figure of a SiC mirror exposed to high po wer synchrotron radiation.