ALTERNATIVELY MATCHED R.F.-PECVD SYSTEM FOR DIAMOND SYNTHESIS

Authors
CHOI Y LEE HW SONG JS SONG YS
Citation
Y. Choi et al., ALTERNATIVELY MATCHED R.F.-PECVD SYSTEM FOR DIAMOND SYNTHESIS, Materials science & engineering. B, Solid-state materials for advanced technology, 39(3), 1996, pp. 10-13
Citations number
20
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
39
Issue
3
Year of publication
1996
Pages
10 - 13
Database
ISI
SICI code
0921-5107(1996)39:3<10:AMRSFD>2.0.ZU;2-N
Abstract
The radio-frequency plasma enhanced chemical vapor deposition (r.f.-PE CVD) system for diamond synthesis was designed incorporating a change of matching circuit, which was accomplished by applying the matching c ircuit of alternative type to the system. it was observed that the alt ernative r.f-PECVD system was suitable for forming stable and luminous plasmas. The diamond particles synthesized from the system were chara cterized using SEM and Raman spectroscopy.