COPPER NITRIDE AND TIN NITRIDE THIN-FILMS FOR WRITE-ONCE OPTICAL-RECORDING MEDIA

The feasibility of using copper nitride and tin nitride thin films as write-once optical recording media was explored. The Cu3N and SnNx fil ms were obtained by the reactive sputtering method. They were thermall y decomposed into Cu and Sn films at 470 and 550 degrees C, respective ly. The Cu him obtained by the thermal decomposition showed a large di fference in reflectance which is applicable to the optical recording m edia. The Sn film obtained by the thermal decomposition included SnO, and consequently it showed a small difference in reflectance from that of SnNx film. (C) 1996 American Institute of Physics.