Two photolithographic methods are described for the formation of patte
rned single or multiple DNA species on SiO2 substrates, In the first a
pproach, substrates are treated with a photochemically labile organosi
lane monolayer film. Irradiation of these surfaces with patterned deep
UV (193 nm) light results in patterned chemically reactive groups whi
ch are then reacted with heterobifunctional crosslinking molecules, Co
valent attachment of modified synthetic DNA oligomers to the crosslink
er results in stable DNA patterns, Alternatively, a photoresist is spi
n-coated over a silane film which had been previously modified with th
e hetero-bifunctional crosslinker, Upon patterned irradiation and subs
equent development, the underlying cross-linker-modified layer is reve
aled, and is then reacted with a chemically modified DNA, Feature dime
nsions to 1 micron are observed when a single fluorescent DNA is attac
hed to the surface, By performing sequential exposures, we have succes
sfully immobilized two distinguishable DNA oligomers on a single surfa
ce, Synthetic DNA immobilized in this manner retains the ability to hy
bridize to its complementary strand, suggesting that these approaches
may find utility in the development of miniaturized DNA-based biosenso
rs.