The surface structure of Si(001)-(2 x 1) was studied using coaxial imp
act-collision ion-scattering spectroscopy(CAICISS). The intensity of t
he backscattered particles was measured as a function of the incident
angle at room temperature. By applying the symmetric and the asymmetri
c dimer models to the experimetal data, we found that the structure of
the Si(001) surface was mixed with symmetric and asymmetric dimers. T
he fraction of asymmetric dimers in a Si(001) clean surface was found
to be around 20% at room temperature.