STRUCTURAL-CHANGES IN POLY(METHYL METHACRYLATE) DURING DEEP-ETCH X-RAY SYNCHROTRON-RADIATION LITHOGRAPHY .2. RADIATION EFFECTS ON PMMA

Authors
SCHMALZ O HESS M KOSFELD R
Citation
O. Schmalz et al., STRUCTURAL-CHANGES IN POLY(METHYL METHACRYLATE) DURING DEEP-ETCH X-RAY SYNCHROTRON-RADIATION LITHOGRAPHY .2. RADIATION EFFECTS ON PMMA, Die Angewandte makromolekulare Chemie, 239, 1996, pp. 79-91
Citations number
24
Categorie Soggetti
Polymer Sciences
Journal title
Die Angewandte makromolekulare Chemie → ACNP
ISSN journal
00033146
Volume
239
Year of publication
1996
Pages
79 - 91
Database
ISI
SICI code
0003-3146(1996)239:<79:SIPMDD>2.0.ZU;2-A
Abstract
The irradiation of poly(methyl methacrylate) changes the chemical cons titution of the polymer. In addition to a decrease in molar mass furth er radiation-induced radical reactions cause changes in the chemical c onstitution of the polymer. Analysis of the reaction products shows th at formation of long-chain branching can be excluded. Along with degra dation of the chain lengths, ester groups in the side chains are attac ked. The result is a modified polymer with a physical and chemical beh aviour different from that of the starting polymer.