BORON DETECTION USING THE NUCLEAR-REACTION B-11(P,ALPHA)2-ALPHA

Authors
VOLLMER M MEYER JD MICHELMANN RW BETHGE K
Citation
M. Vollmer et al., BORON DETECTION USING THE NUCLEAR-REACTION B-11(P,ALPHA)2-ALPHA, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 117(1-2), 1996, pp. 21-25
Citations number
12
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
117
Issue
1-2
Year of publication
1996
Pages
21 - 25
Database
ISI
SICI code
0168-583X(1996)117:1-2<21:BDUTNB>2.0.ZU;2-F
Abstract
The nuclear reaction B-11(p, alpha)2 alpha has been used for the deter mination of boron impurities in silicon. alpha-particles with a contin uous energy spectrum are produced by the three-body-dynamics of this r eaction. Therefore, the differential cross section of this reaction ha s specifically been defined for materials analysis and measured at the three different laboratory angles theta = 108 degrees, 138 degrees, 1 58 degrees, for incident proton energies between 150 keV and 800 keV. The formalism for concentration measurements has been developed for a thin boron layer and for a homogeneous boron distribution in the targe t. The concentration has been compared with results of charged particl e activation analysis (CPAA) using the nuclear reaction B-10(d,n)C-11.