ENERGY-LOSS DISTRIBUTION OF H-2(-TO-100 KEV IN THIN CARBON-FILMS() WITH SIMILAR)

The energy loss spectrum (ELS) of similar to 100 keV H-2(+) transmitte d through carbon films with thickness of 6 - 18 nm, in the region wher e the recombination mechanism is dominant, has been measured by means of high-resolution (similar to 60 eV) ion energy loss spectroscopy (HR IELS). The transmission efficiency of H-2(+) agrees reasonably with th at in literature. The ratio of the peak energy loss of H-2(+) per prot on over that of H+ at the same velocity was obtained as 0.9 +/- 0.1 an d this is slightly smaller than the value of unity expected for the in dependent-particle model. The ratio of the full width at the half maxi mum of the ELS for H-2(+) over that of H+ at the same velocity was obt ained as 1.3 - 1.6, depending on the film thickness and these values d eviate from the value of 1.41 for the independent-particle model, indi cating vicinage effect on the energy loss straggling different from th at on the energy loss.