SPUTTERING YIELD AND MORPHOLOGICAL-CHANGES OF TIB2 COATINGS INDUCED BY DIFFERENT INCIDENT BEAMS

Authors
NENADOVIC T GAKOVIC B TODOROVIC B JOKIC T
Citation
T. Nenadovic et al., SPUTTERING YIELD AND MORPHOLOGICAL-CHANGES OF TIB2 COATINGS INDUCED BY DIFFERENT INCIDENT BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 115(1-4), 1996, pp. 523-527
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
115
Issue
1-4
Year of publication
1996
Pages
523 - 527
Database
ISI
SICI code
0168-583X(1996)115:1-4<523:SYAMOT>2.0.ZU;2-3
Abstract
The properties of TiB2 coatings deposited by direct electron-beam evap oration and by plasma spray deposition as well as their behavior durin g the interaction with the energetic beam are discussed. These coating s are considered as a plasma facing material for some parts of the nex t step tokamak. Sputtering yields were determined for: Ar+ ion bombard ment in the energy region 3-12 keV and laser beam bombardment in the r ange up to 10(9) W/m(2). It was found that whatever the mechanism of s puttering is, a similarity between sputtering yield and energy depende nce for used combinations of incident beams and target does exist.