DEPTH PROFILE ANALYSIS OF POROUS SI FILM BY ERDA USING A DELTA-E-E DETECTOR TELESCOPE

Authors
AVASTHI DK HUI SK SUBRAMANIYAM ET MEHTA BR
Citation
Dk. Avasthi et al., DEPTH PROFILE ANALYSIS OF POROUS SI FILM BY ERDA USING A DELTA-E-E DETECTOR TELESCOPE, Vacuum, 47(9), 1996, pp. 1061-1064
Citations number
21
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
47
Issue
9
Year of publication
1996
Pages
1061 - 1064
Database
ISI
SICI code
0042-207X(1996)47:9<1061:DPAOPS>2.0.ZU;2-O
Abstract
A complete analytical study as well as depth profiling of the constitu ent elements of a porous Si layer have been carried our by elastic rec oil detection analysis using 100 MeV Ag ions and a Delta E-E detector telescope. Quantitative estimates of elements H, C, N, O, F, Mg and Si in a porous Si film have been made. The analysis of data indicates th at the lowest detection limit of the technique is 8 x 10(-4) at% with an inaccuracy of 15%. Copyright (C) 1996 Elsevier Science Ltd.