STUDIES ON QUANTITATIVE X-RAY-DIFFRACTION CHARACTERIZATION OF PHASE DEPTH PROFILES

A fitting method using parallel beam x-ray diffraction (XRD) for profi ling phase content changing with depth is presented. This method depen ds on measurements of XRD intensity at various incident angles, and nu merical procedures are employed for obtaining the true depth profiles quantitatively. The procedures were then applied to a nitrided steel s ample without preferred orientation and a thin-film sample with prefer red orientation. Both model-independent and model-dependent ways were used in fitting. (C) 1996 American Institute of Physics.