SILICON RESONATOR SENSOR SYSTEMS USING SELF-MIXING INTERFEROMETRY

The characteristics of silicon resonator systems for sensing, widely u sed in a range of miniature devices, and interrogated by a novel optic al-fibre interferometer based on the self-mixing interference effect t hat was observed by reflecting light from the resonator back into a la ser cavity, have been investigated. The silicon devices at the heart o f the system are excited acoustically and their resonance behaviour is measured optically in this system. The principle of the interferometr ic technique, in the experimental arrangement used, and the results of the investigations carried out on the system are discussed.