LOW-COST ACCELEROMETERS - 2 EXAMPLES IN THICK-FILM TECHNOLOGY

Authors
CRESCINI D MARIOLI D TARONI A
Citation
D. Crescini et al., LOW-COST ACCELEROMETERS - 2 EXAMPLES IN THICK-FILM TECHNOLOGY, Sensors and actuators. A, Physical, 55(2-3), 1996, pp. 79-85
Citations number
22
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
55
Issue
2-3
Year of publication
1996
Pages
79 - 85
Database
ISI
SICI code
0924-4247(1996)55:2-3<79:LA-2EI>2.0.ZU;2-Z
Abstract
In this paper, two different piezoresistive thick-firm accelerometers are presented: a new high-sensitivity cantilever-type printed on a fer ritic metal substrate and a ceramic twin-mass structure with an elevat ed figure of merit. Design and development are presented together with theoretical predictions and FEM analysis. Optimization procedures and limits are discussed in comparison with experimental results. The ove rall performance of the devices suggests that with proper control of s creen-printing and firing processes, many applications in advanced ind ustrial requirements will be possible in the near future.