SILICON MICROMACHINED INTEGRATED SUSPENSION SYSTEMS FOR MAGNETIC DISKDRIVES

This paper presents results related to the design, fabrication and sta tic/dynamic testing of a silicon micromachined integrated suspension s ystem. This novel magnetic read/write head suspension with its built-i n electrodes has been developed especially for automated assembly with miniaturized slider bearings. The one-piece construction silicon micr ogimbal and the polyimide-reinforced silicon load-beam are designed to have minimum profile, maximum pitch and roll compliances, maximum in- plane stiffness and maximum shack resistance, all of which are importa nt operational requirements for the emerging small-form-factor magneti c recording rigid disk drive market.