FABRICATION OF A SILICON-PYREX-SILICON STACK BY AC ANODIC BONDING

Authors
DESPONT M GROSS H ARROUY F STEBLER C STAUFER U
Citation
M. Despont et al., FABRICATION OF A SILICON-PYREX-SILICON STACK BY AC ANODIC BONDING, Sensors and actuators. A, Physical, 55(2-3), 1996, pp. 219-224
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
55
Issue
2-3
Year of publication
1996
Pages
219 - 224
Database
ISI
SICI code
0924-4247(1996)55:2-3<219:FOASSB>2.0.ZU;2-S
Abstract
This paper reports a new mounting technique for bonding silicon-Pyrex- silicon stacks based on anodic bonding and alternating current (a.c.) excitation. The bond is mechanically stable and strong enough to withs tand a shear force of at least I MPa, or further reactive ion and wet chemical etching processes. The technique has been optimized to be ind ependent of various modifications of the stack dimensions or bonding p arameters (e.g., temperature, voltage, quality of the contact).