OPTIMIZATION OF ETV-ICP-MS CONDITIONS FOR THE DETERMINATION OF MULTI-ELEMENTS IN SEMICONDUCTOR GRADE ACIDS

The performance of an electro thermal vaporization (ETV) unit as a sam ple introduction device for an inductively coupled plasma mass spectro meter (quadrupole-ICP-MS) was evaluated. The technique was found to ha ve several advantages over the conventional nebulization method. Some features of ETV-ICP-MS for single element determination have been inve stigated. Attempts were made to optimize the experimental parameters s uch as vaporization temperature, vaporization interval and carrier gas flow rate. The study highlights on the determination of Cr, Mn, Al an d Na. A compromise condition for multi-element determination was sugge sted and tested from single-element optimum conditions obtained. 25 mu l solution was used for the analysis. Results obtained for the analys is of conc. HCL samples are also reported.