A PATH TO NANOLITHOGRAPHY

Authors
CERRINA F MARRIAN C
Citation
F. Cerrina et C. Marrian, A PATH TO NANOLITHOGRAPHY, MRS bulletin, 21(12), 1996, pp. 56-62
Citations number
24
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
21
Issue
12
Year of publication
1996
Pages
56 - 62
Database
ISI
SICI code
0883-7694(1996)21:12<56:APTN>2.0.ZU;2-O