J. Teichert et al., INVESTIGATION OF THE ION-ACOUSTIC EFFECT DURING FOCUSED ION-BEAM IRRADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 120(1-4), 1996, pp. 311-314
Acoustic waves induced by an intensity modulated focused ion beam (FIB
) have been measured. The experiments were performed with Ga+ ions of
35 keV at a current of 3 nA and variable chopping frequency up to 10 M
Hz. The acoustic signals were detected by means of a piezoelectric sen
sor with integrated pre-amplifier. A dependence on the sample material
was found during line scan FIB motion. The results show that the ion-
acoustic effect may be utilized for an alternative sample imaging and
material analysis in FIB systems.