INVESTIGATION OF THE ION-ACOUSTIC EFFECT DURING FOCUSED ION-BEAM IRRADIATION

Authors
TEICHERT J BISCHOFF L KOHLER B
Citation
J. Teichert et al., INVESTIGATION OF THE ION-ACOUSTIC EFFECT DURING FOCUSED ION-BEAM IRRADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 120(1-4), 1996, pp. 311-314
Citations number
12
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
120
Issue
1-4
Year of publication
1996
Pages
311 - 314
Database
ISI
SICI code
0168-583X(1996)120:1-4<311:IOTIED>2.0.ZU;2-T
Abstract
Acoustic waves induced by an intensity modulated focused ion beam (FIB ) have been measured. The experiments were performed with Ga+ ions of 35 keV at a current of 3 nA and variable chopping frequency up to 10 M Hz. The acoustic signals were detected by means of a piezoelectric sen sor with integrated pre-amplifier. A dependence on the sample material was found during line scan FIB motion. The results show that the ion- acoustic effect may be utilized for an alternative sample imaging and material analysis in FIB systems.