PLASMA-IMMERSION ION-IMPLANTATION

Authors
MANTESE JV BROWN IG CHEUNG NW COLLINS GA
Citation
Jv. Mantese et al., PLASMA-IMMERSION ION-IMPLANTATION, MRS bulletin, 21(8), 1996, pp. 52-56
Citations number
50
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
21
Issue
8
Year of publication
1996
Pages
52 - 56
Database
ISI
SICI code
0883-7694(1996)21:8<52:PI>2.0.ZU;2-Y