H. Katsumata et al., PHOTOLUMINESCENCE AND RAMAN-SCATTERING STUDIES OF 2 MEV YB-IMPLANTED INP AS A FUNCTION OF ETCHING DEPTH(), Journal of applied physics, 80(4), 1996, pp. 2383-2387
In ion-implanted semiconductors, details of the defects involved and a
nnealing mechanisms which determine the final disorder structure are c
omplicated and difficult to characterize. To investigate the residual
defect distribution of the implanted layers, optical experiments, phot
oluminescence, photoluminescence excitation, and Raman scattering have
been performed on 2 MeV Yb+-implanted InP and subsequently annealed a
t 750 degrees C for 15 min as a function of chemical etching depth (d)
down to d=4.51xR(p) (R(p): projected range =410 nm). Their results we
re compared with those obtained from Rutherford backscattering spectro
metry (RBS) channeling analysis. The above optical experiments showed
that two residual defective regions are present at depths of d=0.34-0.
80>< R(p) and about d=2.56>< R(p), whereas RBS channeling analysis ind
icated the existence of the only former region. We assign the type of
the two defective regions to ''clamshell'' defects in the former regio
n and to ''end-of-range'' defects in the latter region. (C) 1996 Ameri
can Institute of Physics.