QUANTITATIVE STUDY OF INTERFACE ROUGHNESS REPLICATION IN MULTILAYERS USING X-RAY REFLECTIVITY AND TRANSMISSION ELECTRON-MICROSCOPY

The recently appeared distorted wave Born approximation formalism is u sed for quantitative: determination of interface roughness replication and lateral correlation length in periodical multilayered structures. The results obtained from x-ray diffraction are in very good agreemen t with analysis of cross-section transmission electron micrographs, We interpret transparently the obtained parameters and demonstrate the a bility of the low-angle x-ray diffraction methodology for nondestructi ve and quantitative studying of interface roughness in magnetic multil ayers. (C) 1996 American Institute of Physics.