Edge detection algorithms have been developed to partition an image fi
eld into subfields representing regions with different properties. Edg
es are defined by relatively notable and distinguishable image changes
. Among advanced theories, fuzzy logic (FL) is highly suited to detect
such edges. High-resolution electron micrographs (HREM) of crystallin
e specimens reveal the nature of crystals. For studying interdiffusion
phenomena in layered structures of III-V compounds, image variations,
described by the term similarity, are interpreted. Contrary to natura
l images, a periodic array of subunits (crystal cells) dominates the i
mage patterns in HREM applications. The crystallographic cells are rep
resented by values of similarity, related to known templates of a III-
V compounds by a difference measure of similarity. The idea of this fu
zzy edge detection algorithm is to analyze the transition taking place
between the two neighboring sides of the edge. The limited number of
cells requires fitted masks of neighboring cells, and also serves as i
nput to the set of dedicated fuzzy rules. Applying two triangular memb
ership functions, the location of the most significant composition ste
ps can be determined. After analyzing simulated HREM patterns, the fuz
zy logic development tool has been employed to obtain the edges on exp
erimental micrographs of MBE-grown Al/GaAs.