M. Chang et Pp. Lin, NONCONTACT SPHERICITY MEASUREMENT BY MEANS OF PHASE-SHIFT INTERFEROMETRY, Journal of manufacturing science and engineering, 118(3), 1996, pp. 394-399
This paper presents an accurate optical technique for sphericity measu
rement of a ball by means of phase shift interferometry. The ball is p
laced in a fixture on a numerically control rotary stage to achieve a
360 degrees inspection. A CCD camera is used to capture the images of
interference fringes, and the generated interferograms are used to cal
culate the phase values which can then be used to quantify the spheric
ity error. With the calculated phase values, the eccentricity of the r
otary stage's spindle can be estimated and compensated. The Zernike po
lynomials is employed in the process of calibration to gracefully remo
ve defocus and tilts. The experimental procedure, the sphericity measu
rement results and their statistical data analysis are presented.