TRUE AUGER SPECTRAL SHAPES (STANDARDS)

A novel cylindrical mirror analyzer (CMA) has been developed to obtain standard spectra in Auger electron spectroscopy. The spectra were obt ained absolutely by using an electrometer. The measured energy resolut ion is 0.24% and the transmission was estimated to be 5.6%. The primar y energy and current were set with an accuracy within +/-0.01% and +/- 1%, respectively. The sweep energy was directly measured with a precis e high voltage divider. Thus the spectra can be calibrated with an acc uracy of 0.1 eV. Auger spectra of nickel (the round robin sample) were obtained, Total range of spectra are reported for the primary acceler ating voltages ranging 1.0-5000.0 V. We can quantitatively identify ev ery spectrum except a broad peak at 18.5 eV. The L-loss spectrum was o bserved as a critical bend of background rather than a peak. The LVV A uger peaks which are very small then usually having been missed were o btained as well. Very small fractions of carbon contamination on the N i showed atomic like KLL (triplet or quintuplet) transitions.