COMPARISON OF AES CHEMICAL-SHIFTS WITH XPS CHEMICAL

Scanning Auger microprobe equipped with a concentric hemispherical ana lyzer allows us to measure AES spectra with high-energy resolution. Th e question is the extent of chemical state information obtainable by A ES. XPS chemical shifts and AES chemical shifts, derived from transiti on energies available from literature, have been compared for many com pounds. The mean values were found to be for peak shift 1.71 eV in the case of XPS and -3.86 eV for AES, and the standard deviations were 2. 38 eV for XPS and 3.62 eV for AES. We found that the chemical shifts i n AES were generally 1.5 times larger than in XPS. For some elements s uch as Fe, Co, Ni, and Cu, the AES chemical shifts are exceptionally s mall, but the peak shapes differ depending on the chemical states.