We have found that electrons with high primary energy improve the spat
ial resolution of the scanning Auger microprobe with a field emission
gun (FE-SAM) in the analysis of a very small particle. Auger line scan
s across a 0.3 mu m O alumina (Al2O3) particle on a Si substrate were
performed at different primary beam voltages (5, 10, 15, and 20 kV; be
am diameters were below 60 nm) by an FE-SAM instrument. Intensities of
Si KLL and LVV signals at the center of the particle decreased at hig
her primary voltages. Electrons with higher energy will penetrate deep
into the particle to reduce edge effects that drastically degrade spa
tial resolution.