SUBMICRON PARTICLE ANALYSIS BY THE AUGER MICROPROBE (FE-SAM)

We have found that electrons with high primary energy improve the spat ial resolution of the scanning Auger microprobe with a field emission gun (FE-SAM) in the analysis of a very small particle. Auger line scan s across a 0.3 mu m O alumina (Al2O3) particle on a Si substrate were performed at different primary beam voltages (5, 10, 15, and 20 kV; be am diameters were below 60 nm) by an FE-SAM instrument. Intensities of Si KLL and LVV signals at the center of the particle decreased at hig her primary voltages. Electrons with higher energy will penetrate deep into the particle to reduce edge effects that drastically degrade spa tial resolution.