HEATING EFFECTS ON MODIFYING CARBON SURFACE BY REACTIVE PLASMA

In the surface modification by plasma, surface properties changes with time after the plasma treatment. Such changes should be avoided for p ractical application. Glassy carbon (GC) was subjected to simultaneous plasma and heat treatments in order to investigate the respective eff ects. Source gases were tetrafluoromethane (CF4) and oxygen (O-2). Tre atment time and heating temperature of the GC plate were 30 min and 20 0-500 degrees C, respectively. The surface properties before and after plasma treatment were studied with contact angle measurements and ESC A. When the GC was heated at 400 degrees C during CF4 plasma treatment , the contact angle after plasma treatment was 133 degrees and constan t even after 24 h. At 500 degrees C during O-2 plasma treatment, the c ontact angle after plasma treatment was 0 degrees and constant even af ter 24 h. It is found that heating carbon surface during CF4 or O-2 pl asma treatment is effective to stop the change with time after plasma treatment.