WATER-VAPOR EFFECTS ON THE TEO2 TE THIN-FILM CONDUCTANCE/

An investigation of water vapor effects on the electrical conductivity of a TeO2/Te thin film is carried out. TeO2 evaporated from the BN bo at was deposited onto the Te film. TeO2 and Te layers are of 30 nm thi ck and 100 nm thick, respectively. Electrical conductance measurements of the TeO2/Te thin film were performed in the chamber maintained at constant temperatures. The conductance of the TeO2/Te thin film in wet argon is lower than that in dry argon. These phenomena suggest that t he TeO2/Te thin film can be applied to a new humidity sensor. The deso rption rate constant analysis reveals that the activation energy of th e H2O desorption is ca. 32 kJ/mol, which indicates weak-chemical adsor ption of H2O molecules on the TeO2/Te thin film surface.