ANGULAR RESOLVED EPMA ANALYSIS OF THIN-FILMS PREPARED BY PULSED-LASERABLATION OF CDWO4(010)

Thin films prepared by focused 266 nm pulsed laser ablation of CdWO4(0 10) single crystals were analyzed with an electron probe micro analysi s (EPMA) as a function of the desorbing angle theta from the normal su rface, which corresponds to the position of the films. The spatial dis tribution of the ablated particles and the chemical composition of the films were studied by focusing the effects of O-2 gas pressure and th e substrate-target distance. These results were interpreted by the com parison with the size of the ablation plume determined by the photogra ph. The thin films with nearly the stoichiometric composition showed a photoluminescence similar to the single crystal.