CARBON AUGER PEAK SHAPE MEASUREMENTS IN THE CHARACTERIZATION OF REACTIONS ON (001) DIAMOND

The measurements of Auger peak shape changes and peak shifts as a fing erprint for chemical changes on solid surfaces are well known. The car bon Auger peak shape changes have been measured to characterize reacti ons on a (001) diamond single crystal surface. Firstly the influence o f Ar+ ion sputtering on the diamond surface was investigated. Upon spu ttering the surface, the carbon Auger peak shape changes from the typi cal diamond to the graphite form within about one minute sputtering. T he peak form change with time has been correlated with different diamo nd and graphite contributions. The decrease of the diamond contributio n with sputter time has been described in terms of a transition probab ility of the carbon sp(3) to sp(2) bond. Secondly the formation of TiC at the interface of a Ti overlayer and the diamond substrate upon ann ealing, in order to produce good and stable ohmic contacts to the diam ond, was confirmed by comparing the measured data with data simulated by calculation of the carbide and graphite contributions to the final carbon (KLL) peak shape.