N. Nagashima et al., NANOSCOPIC HARDNESS MEASUREMENT BY ATOMIC-FORCE MICROSCOPE, JSME international journal. Series A, mechanics and material engineering, 39(3), 1996, pp. 456-462
Atomic force microscopes (AFMs) can be used for atomic-scale imaging a
nd nanofabrication, Taking advantage of this we developed a nanoindent
ation technique. Hardness measurements were carried out on cementite-s
pheroidized S 25 C carbon steel (Vickers hardness Hv=128) and 400 degr
ees C-tempered SNCM 439 low alloy steel (H-v=414), using a cantilever
with a three-sided pyramidal diamond tip. The depth of indentations cr
eated was between 14 and 330 nm. The difference in hardness between S
25 C and SNCM 439 steels was detected in the nanoscopic region. From t
hese results, it was concluded that nanoindentation was realized with
AFM.