PRACTICAL PERFORMANCE OF ENERGY-DISPERSIVE X-RAY SPECTROSCOPY WITH A HIGH-VOLTAGE TEM UP TO 1,000 KV

The performance of energy-dispersive X-ray spectroscopy (EDS) with a n ew analytical high-voltage TEM is reported, A detector with an ultrath in window was designed to set in a horizontal position, and shielding devices of apertures and metal blocks were specially inserted into the column to reduce stray X-rays generated by primary electrons up to 1, 000 kV, The characteristic X-ray spectra of type-316 austenitic stainl ess steel were successfully measured at 400 to 1,000 kV with changing the energy resolution from 142 to 159 eV for a Fe-K alpha peak, The no ise level at the X-ray energy below 1 keV slightly increased during th e operation at 1,000 kV and the insufficient shield at the gun alignme nt coil system could be responsible for the generation of the backgrou nd X-rays, The usefulness of EDS analyses at 1,000 kV is demonstrated for Si(100) from the viewpoint of the relative low contamination of ca rbon which provides an advantage for the light element analysis.