DEPTH PROFILING OF IMPLANTED NITROGEN USI NG NARROW NUCLEAR RESONANCES .1. AUTOMATIC DATA-ACQUISITION

A simple energy scanning and data acquisition system for nuclear reson ance analysis with a narrow resonance is presented. Ion beam energy wa s scanned by supplying a bias of -30 kV similar to +30 kV on a target holder. Since the proton energy is controlled by the bias voltage with out changing the terminal voltage of the accelerator, scattering of da ta in a gamma-ray excitation curve is very small. Details of the energ y scanning and the data acquisition are described. Some examples for t he depth profiling of nitrogen implanted into metals using the nuclear reaction N-15(p, alpha gamma)C-12 at 429 keV are shown and compared w ith the calculated results by a Monte Carlo simulation.