PULSED-LASER DEPOSITION OF BI2TE3 THIN-FILMS

A feasibility study of thin stoichiometric Bi2Te3 films by pulsed lase r deposition (PLD) was performed, the difficulty arising from the diff erences of vapour pressure between Te and Bi. The films were elaborate d using a pulsed Nd:YAG laser under various experimental conditions an d were characterized by electron microprobe, scanning electron microsc opy, X-ray diffraction and secondary ion mass spectroscopy analyses. C ongruent transfer of stoichiometry occurs from the target to the subst rate on several cm(2) and a good crystallinity can be achieved, even o n glass substrates at room temperature, by combining convenient target to substrate facing and distance, respectively. Depletion in Te obser ved in some films may result from a laser beam-plume interaction that was put forward during elaboration of films on large scale substrates.