STRUCTURAL-CHANGES IN NITROGEN-DOPED A C-H FILMS

The influence of nitrogen on the microstructure of a-C:H film is inves tigated by infrared, photoluminescence (PL), and transmittance-reflect ance spectra, It is indicated that nitrogen incorporation into a-C:H n etwork will weaken some C-H bonds, which is confirmed by differential scanning calorimeter experimental results, It is also demonstrated tha t nitrogen entering into a-C:H film can raise luminescence intensity, On the other hand, nitrogenation will reduce PL thermal stability.